Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
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Aerosol-assisted CVD of thioether-functionalised indium aminoalkoxides
ABSTRACT Thioether-functionalised indium aminoalcoholates have been used as single-source precursors in aerosol-assisted CVD processes. The obtained In2O3-x S x oxysulphide deposits show either a single indium sulphide phase for deposits with high sulphide content [>75% (S/(S + O)) for the t-butyl derivatives] or pronounced phase separation in indium oxide and indium sulphide for lower sulphide...
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ژورنال
عنوان ژورنال: Monatshefte für Chemie - Chemical Monthly
سال: 2017
ISSN: 0026-9247,1434-4475
DOI: 10.1007/s00706-017-1980-2